Volume 5, Number 1, pp. 37-40
An accurate new 3D-motion analyser for MEMS and bioMEMS
C. Rembe, A. Dräbenstedt and F. Heimes
Polytec GmbH, Research & Development, Polytec-Platz 1-7, 76337 Waldbronn, Germany
We have developed a new measurement tool for full three-dimensional-motion characterization of microelectromechanical systems (MEMS). The new system is a hybrid combination of two different measurement methods. The Planar Motion Analyser (PMA) employs machine-vision methods and is used for in-plane measurements. To study in-plane motions at user-defined frequencies as high as 2 MHz without a high-speed camera a stroboscopic technique and digital-image processing is applied. The PMA is combined with a Microscope Scanning Vibrometer (MSV) that is outstandingly suited for out-of-plane measurements. The result is a new three-dimensional motion characterization tool - the Micro Motion Analyser (MMA). The determination of the system resolution, precision, and accuracy are presented in this paper. The system discussed in this paper can be mounted on the C-mount of a standard bright-field microscope.